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No‐Heating Deposition of 1‐μm‐Thick Y‐Doped HfO<sub>2</sub> Ferroelectric Films with Good Ferroelectric and Piezoelectric Properties by Radio Frequency Magnetron Sputtering Method.
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- Physica Status Solidi - Rapid Research Letters, 2022, v. 16, n. 10, p. 1, doi. 10.1002/pssr.202100574
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No‐Heating Deposition of Ferroelectric x%YO<sub>1.5</sub>–(100−x%)(Hf<sub>1−y</sub>Zr<sub>y</sub>)O<sub>2</sub> Films.
- Published in:
- Physica Status Solidi. A: Applications & Materials Science, 2023, v. 220, n. 14, p. 1, doi. 10.1002/pssa.202300100
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- Article