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- Title
Magnetostrictive Performance of Electrodeposited TbxDy(1−x)Fey Thin Film with Microcantilever Structures.
- Authors
Shim, Hang; Sakamoto, Kei; Inomata, Naoki; Toda, Masaya; Toan, Nguyen Van; Ono, Takahito
- Abstract
The microfabrication with a magnetostrictive TbxDy(1−x)Fey thin film for magnetic microactuators is developed, and the magnetic and magnetostrictive actuation performances of the deposited thin film are evaluated. The magnetostrictive thin film of TbxDy(1−x)Fey is deposited on a metal seed layer by electrodeposition using a potentiostat in an aqueous solution. Bi-material cantilever structures with the Tb0.36Dy0.64Fe1.9 thin-film are fabricated using microfabrication, and the magnetic actuation performances are evaluated under the application of a magnetic field. The actuators show large magnetostriction coefficients of approximately 1250 ppm at a magnetic field of 11000 Oe.
- Subjects
THIN films; MAGNETIC films; MAGNETICS; MAGNETIC fields; MICROACTUATORS
- Publication
Micromachines, 2020, Vol 11, Issue 5, p523
- ISSN
2072-666X
- Publication type
Article
- DOI
10.3390/mi11050523