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TiO2 Inverse Opals Fabricated Using Low-Temperature Atomic Layer DepositionThis work was supported by the U.S. Army Research Office under MURI contract DAAD19-01-1-0603, and the Georgia Institute of Technology Molecular Design Institute under prime contract N00014-95-1-1116 from the Office of Naval Research. We also thank S. Blomquist and the U.S. Army Research Lab for assistance with preliminary ALD studies.