Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleQuantitative Film Thickness Measurement Using Scintillator/Photomultiplier Backscattered Electron Detectors. Possible or Not?AuthorsHovington, Pierre; Lagacé, Marin; Noël, PierrePublicationMicroscopy & Microanalysis, 2005, Vol 11, p772ISSN1431-9276Publication typeArticleDOI10.1017/S1431927605507670