We found a match
Your institution may have access to this item. Find your institution then sign in to continue.
- Title
Inhomogeneous SiO[sub x]<Fe> Metal-Dielectric Films as a Material for Infrared Thermal Radiation Detectors.
- Authors
Michailovskaya, E.V.; Indutnyy, I.Z.; Shepeliavyi, P.E.
- Abstract
A vacuum deposition method for producing SiO[sub x]<Fe> composite metal-dielectric films in which the metal concentration in the SiO[sub x] dielectric matrix varies across thickness is described. The reflection and transmission of the films in the 2–12 μm IR spectral range are studied and their optical properties are simulated. In the temperature range 283–390 K, the temperature-sensitive properties of the SiO[sub x]<Fe> films with a phase volume ratio of 23% (Fe) : 77% (SiO) is investigated. For these films, the temperature coefficient of resistance is found. The feasibility of these films as a sensitive layer in microbolometers is demonstrated. © 2003 MAIK “Nauka / Interperiodica”.
- Subjects
SILICON oxide films; DIELECTRIC films
- Publication
Technical Physics, 2003, Vol 48, Issue 2, p261
- ISSN
1063-7842
- Publication type
Article
- DOI
10.1134/1.1553571