Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleEnhanced AP-PE-CVD Process Understanding and Control by Application of Integrated Optical, Electrical and Modelling Diagnostics.AuthorsSawtell, David; Martin, Philip A.; Sheel, David W.PublicationPlasma Processes & Polymers, 2009, Vol 6, pS637ISSN1612-8850Publication typeArticleDOI10.1002/ppap.200931608