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- Title
Superconductive Nb<sub>3</sub>Sn Coatings Synthesized for Charged-Particle Accelerators Using Magnetron Sputtering.
- Authors
Yurjev, Yu. N.; Bordulev, Yu. S.; Kharisova, A. E.; Selezneva, T. V.; Savelev, A. I.; Kazimirov, A. I.
- Abstract
The paper considers the formation mechanisms of triniobium tin coatings during their deposition by magnetron sputtering using a stoichiometric target. The optimum mode is identified for the magnetron source operation. Investigated are the elemental and phase compositions, coating microstructure, and its change during the high-temperature annealing. It is found that magnetron sputtering coatings deposited in the vacuum chamber at 0.3 Pa and annealed at 800°C, possess the optimum elemental and phase compositions.
- Subjects
MAGNETRON sputtering; CHARGED particle accelerators; MAGNETRONS; SURFACE coatings; VACUUM chambers
- Publication
Russian Physics Journal, 2023, Vol 65, Issue 11, p1996
- ISSN
1064-8887
- Publication type
Article
- DOI
10.1007/s11182-023-02861-z