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- Title
Combination of glow-discharge and arc plasmas for CF[sub 4] abatement.
- Authors
Huang, Aimin; Xia, Guanguang; Spiess, Franz-Josef; Chen, Xiao; Rozak, Jeffery; Suib, Steven L.; Takahashi, Tomonori; Hayashi, Yuji; Matsumoto, Hiroshige
- Abstract
Decomposition of CF[sub 4] by glow-discharge and arc plasmas was studied using a tubular quartz reactor, a disk type, and a T-type quartz reactor. The effects of different metal electrodes, input voltage, and reactor type on the efficiency of CF[sub 4] total destruction (DRE) were studied. The T-shape reactor was more efficient in CF[sub 4] destruction than either the disk or tubular type due to a combined effect of glow discharge and arc plasmas. Several hydrogen and oxygen sources, such as H[sub 2]O, H[sub 2], O[sub 2], and CH[sub 4], were used to convert CF[sub 4]. Using H[sub 2] and O[sub 2] as the hydrogen and oxygen sources presented better DRE than using H[sub 2]O. The effect of different hydrogen and oxygen sources on the conversion of CF[sub 4] followed the trend: (H[sub 2] + O[sub 2]) > (CH[sub 4] + O[sub 2]) > H[sub 2]O. The maximum DRE of 95% was observed with 0.5% CF[sub 4] using H[sub 2] and O[sub 2]. A mass spectrometer and an emission spectroscope equipped with a charge-coupled detector (CCD) were used to characterize the products and intermediates. Mass spectrometric studies indicated that the reaction products were HF, CO[sub 2], and trace amounts of NO. N[sub 2] first negative and second positive emission lines were observed in the glow discharge plasmas as well as in the arc plasmas of N[sub 2]. However, C and F intermediates were observed only in arc plasmas of CF[sub 4]. Reactions occurring in the glow discharge plasmas and arcs seem to follow different mechanisms.
- Subjects
GLOW discharges; CARBON; FLUORIDES
- Publication
Research on Chemical Intermediates, 2001, Vol 27, Issue 9, p957
- ISSN
0922-6168
- Publication type
Article
- DOI
10.1163/156856701753536697