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- Title
Characterization of lead zirconate titanate (53/47) films fabricated by a simplified sol-gel acetic-acid route.
- Authors
Mayén-Mondragón, R.; Yánez-Limón, J.; Moya-Canul, K.; Herrera-Gomez, A.; Vazquez-Lepe, M.; Espinoza-Beltrán, F.; López Beltrán, A.
- Abstract
Lead zirconate titanate [PZT (53/47)] films (around 200 nm thick) were prepared by the sol-gel acetic-acid route, spin-coating onto Si/SiO/Pt substrates. A simple thermal annealing program rendered complete crystallization to the perovskite phase and full removal of the organic material. The 53/47 film composition was attained in the bulk, however, X-ray photoelectron spectroscopy detected a different titanium/zirconium ratio at the film surface. Hysteresis loops were measured using a film-tester constructed at our laboratory. The single-annealed films showed a high resistive leakage. A second annealing cycle led to a better film densification and a marked reduction in surface roughness, significantly enhancing the ferroelectric response. Ferroelectric domains were mapped by piezoresponse force measurements. The relatively-simple experimental procedure applied allowed the fabrication of good quality ferroelectric films.
- Subjects
LEAD zirconate titanate films; MICROFABRICATION; SOL-gel processes; ACETIC acid; X-ray photoelectron spectroscopy; SPIN coating; SUBSTRATES (Materials science); HYSTERESIS
- Publication
Journal of Materials Science: Materials in Electronics, 2013, Vol 24, Issue 6, p1981
- ISSN
0957-4522
- Publication type
Article
- DOI
10.1007/s10854-012-1045-6