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- Title
Influence of Preferred Orientation on the Electrical Conductivity of Fluorine-Doped Tin Oxide Films.
- Authors
Jian Tao Wang; Xiang Lei Shi; Wei Wei Liu; Xin Hua Zhong; Jian Nong Wang; Pyrah, Leo; Sanderson, Kevin D.; Ramsey, Philip M.; Masahiro Hirata; Keiko Tsuri
- Abstract
Current development of high-performance transparent conductive oxide (TCO) films is limited with tradeoff between carrier mobility and concentration since none of them can be improved without sacrificing the other. In this study, we prepare fluorine doped tin oxide (FTO) films by chemical vapor deposition with inclusions of different additives and report that the mobility can be varied from 0.65 to 28.5 cm2 V-1 s-1 without reducing the achieved high carrier concentration of 4 × 1020 cm-3. Such an increase in mobility is shown to be clearly associated with the development of (200) preferred orientation (PO) but concurrent degradation of (110) PO in films. Thus, at a constant high carrier concentration, the electrical conductivity can be improved via carrier mobility simply by PO control. Such a one-step approach avoiding conventional post-deposition treatment is suggested for developing next-generation FTO as well as other TCO films with better than ever conductivities.
- Subjects
TIN oxides; FLUORINE; ELECTRIC conductivity; CHEMICAL vapor deposition; VAPOR-plating
- Publication
Scientific Reports, 2014, p1
- ISSN
2045-2322
- Publication type
Article
- DOI
10.1038/srep03679