Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleBücher: Metal Based Thin Films für Electronics. By: K. Wetzig, C.M. Schneider (Eds.).AuthorsBlau, WinfriedPublicationVakuum in Forschung und Praxis, 2004, Vol 16, Issue 2, p105ISSN0947-076XPublication typeArticleDOI10.1002/vipr.200490012