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- Title
An analytical depth resolution function for the MRI model.
- Authors
Liu, Y.; Hofmann, S.; Wang, J. Y.
- Abstract
The mixing roughness information depth model is frequently used for the quantification of sputter depth profiles. In general, the solution of the convolution integral for any kind of in-depth distributions is achieved by numerical methods. For a thin delta layer, an analytical depth resolution function is presented, which enables a simple and user-friendly quantification of measured delta layer profiles in AES, XPS and SIMS. Copyright © 2013 John Wiley & Sons, Ltd.
- Subjects
MAGNETIC resonance imaging; SPUTTERING (Physics); AUGER electron spectroscopy; X-ray photoelectron spectroscopy; SECONDARY ion mass spectrometry; ANALYTICAL solutions; GAUSSIAN distribution
- Publication
Surface & Interface Analysis: SIA, 2013, Vol 45, Issue 11, p1659
- ISSN
0142-2421
- Publication type
Article
- DOI
10.1002/sia.5319