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- Title
Batch production of 6-inch uniform monolayer molybdenum disulfide catalyzed by sodium in glass.
- Authors
Pengfei Yang; Xiaolong Zou; Zhepeng Zhang; Min Hong; Jianping Shi; Shulin Chen; Jiapei Shu; Liyun Zhao; Shaolong Jiang; Xiebo Zhou; Yahuan Huan; Chunyu Xie; Peng Gao; Qing Chen; Qing Zhang; Zhongfan Liu; Yanfeng Zhang
- Abstract
Monolayer transition metal dichalcogenides (TMDs) have become essential two-dimensional materials for their perspectives in engineering next-generation electronics. For related applications, the controlled growth of large-area uniform monolayer TMDs is crucial, while it remains challenging. Herein, we report the direct synthesis of 6-inch uniform monolayer molybdenum disulfide on the solid soda-lime glass, through a designed face-to-face metalprecursor supply route in a facile chemical vapor deposition process. We find that the highly uniform monolayer film, with the composite domains possessing an edge length larger than 400 μm, can be achieved within a quite short time of 8 min. This highly efficient growth is proven to be facilitated by sodium catalysts that are homogenously distributed in glass, according to our experimental facts and density functional theory calculations. This work provides insights into the batch production of highly uniform TMD films on the functional glass substrate with the advantages of low cost, easily transferrable, and compatible with direct applications.
- Subjects
DENSITY functional theory; CHEMICAL vapor deposition; MOLYBDENUM sulfides; MOLYBDENUM disulfide; GLASS; SODIUM compounds; ELECTRONICS engineers; MONOMOLECULAR films
- Publication
Nature Communications, 2018, Vol 9, Issue 1, p1
- ISSN
2041-1723
- Publication type
Article
- DOI
10.1038/s41467-018-03388-5