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- Title
A Compact Vertical Scanner for Atomic Force Microscopes.
- Authors
Jae Hong Park; Jaesool Shim; Dong-Yeon Lee
- Abstract
A compact vertical scanner for an atomic force microscope (AFM) is developed. The vertical scanner is designed to have no interference with the optical microscope for viewing the cantilever. The theoretical stiffness and resonance of the scanner are derived and verified via finite element analysis. An optimal design process that maximizes the resonance frequency is performed. To evaluate the scanner's performance, experiments are performed to evaluate the travel range, resonance frequency, and feedback noise level. In addition, an AFM image using the proposed vertical scanner is generated.
- Subjects
SCANNING systems; ATOMIC force microscopy; SCANNING electron microscopy; PIEZOELECTRICITY; AUTOMATIC control systems
- Publication
Sensors (14248220), 2010, Vol 10, Issue 12, p10673
- ISSN
1424-8220
- Publication type
Article
- DOI
10.3390/s101210673