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- Title
Formation of cellular structure in SiGe layers under nanosecond laser irradiation.
- Authors
Gatskevich, E.; Ivlev, G.; Malevich, V.
- Abstract
Heating, melting, and crystallization processes of SiGe solid solution on a silicon substrate occurring under the influence of nanosecond laser irradiation were numerically simulated. Formation of cellular structures during solidification of the binary melt due to a segregation element separation was analyzed. Calculation results were compared with known experimental data characterizing the duration of laser-induced phase transformations and average sizes of the cells (which are formed due to the effect of concentration supercooling) as a function of the power density in the laser pulse.
- Subjects
SILICON; LASER beams; CRYSTALLIZATION; SOLID solutions; PHASE transitions; LASERS; POWER density
- Publication
Technical Physics Letters, 2015, Vol 41, Issue 1, p21
- ISSN
1063-7850
- Publication type
Article
- DOI
10.1134/S1063785015010046