We found a match
Your institution may have access to this item. Find your institution then sign in to continue.
- Title
Features of the structural state and mechanical properties of ZrN and Zr(Ti)-Si-N coatings obtained by ion-plasma deposition technique.
- Authors
Pogrebnyak, A. D.; Sobol', O. V.; Beresnev, V. M.; Turbin, P. V.; Dub, S. N.; Kirik, G. V.; Dmitrenko, A. E.
- Abstract
The possibility of obtaining hard nanocrystalline coatings using vacuum-arc deposition in a high-frequency discharge stimulated regime has been studied. Condensates of the Zr(Ti)-Si-N system obtained by this method contain ZrN and TiN crystalline grains. These grains exhibit a compressive strain of about −1.1% in the film growth plane, which corresponds to compressive stresses up to about 3.5 GPa in the film-substrate system. The results of nanoindentation show evidence for a strong inhomogeneity of the coatings, in which regions possessing a hardness of 29–30 GPa alternate with those where the hardness exceeds 45–47 GPa. This pattern agrees with a two-phase model based on the structural data, according to which the condensed material consists of less hard ZrN grains and harder TiN grains.
- Subjects
NANOCRYSTALS; VACUUM arcs; COATING processes; RESEARCH; HARDNESS
- Publication
Technical Physics Letters, 2009, Vol 35, Issue 10, p925
- ISSN
1063-7850
- Publication type
Article
- DOI
10.1134/S1063785009100150