Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleA Design Study of a Heat Flow-Type Reading Head for a Linear Encoder Based on a Micro Thermal Sensor.AuthorsShimizu, Yuki; Ishida, Ayaka; Matsuno, Yuki; Matsukuma, Hiraku; Gao, WeiPublicationNanomanufacturing & Metrology, 2019, Vol 2, Issue 2, p100ISSN2520-811XPublication typeArticleDOI10.1007/s41871-019-00037-3