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- Title
CHARACTERISTICS OF THE INTERFACES AND THE PROPERTIES OF CHROMIUM OXIDE NANOLAYERS ON GALLIUM ARSENIDE.
- Authors
Ezhovskii, Yu. K.
- Abstract
This paper reports on the experimental results of investigations into the electrical properties of chromium oxide ultrathin layers (nanostructures) synthesized on the GaAs(100) and GaAs(110) surfaces through the molecular layer-by-layer growth (atomic layer deposition). It is established that the synthesis conditions and the layer composition affect the characteristics of the semiconductor--dielectric interface.
- Subjects
CHROMIUM oxide; ELECTRIC properties of nanostructured materials; NANOPARTICLE synthesis; ATOMIC layer deposition; DIELECTRIC function
- Publication
Smart Nanocomposites, 2015, Vol 6, Issue 2, p133
- ISSN
1949-4823
- Publication type
Article