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- Title
Post-growth annealing and wide bandgap modulation of BeZnO layers grown by RF co-sputtering of ZnO and Be targets.
- Authors
Yu, J. H.; Park, D. S.; Kim, J. H.; Jeong, T. S.; Youn, C. J.; Hong, K. J.
- Abstract
ZnO based oxide system BexZn1−xO alloy of various compositions has been successfully grown by the RF co-sputtering method. The crystallinity of the BexZn1−xO alloys has been remarkably improved after the post-annealing at 600 °C compared with the BexZn1−xO alloys post-annealed at other temperatures. The x value of the BexZn1−xO layers has been increased from 0.022 to 0.17 by adjusting the RF-power of the Be target. Also, the optical bandgap energy has been modulated from 3.2218 to 3.7978 eV, respectively. Based on our results, a bandgap bowing parameter of BexZn1−xO alloy has been extracted out to be 4.5 eV. These findings could be useful to fabricate the ZnO/BexZn1−xO quantum structures and bandgap modulation for deep ultraviolet-light-emitting diodes.
- Subjects
ANNEALING of metals; ZINC oxide; ALLOYS; LIGHT emitting diodes; HEAT treatment of metals
- Publication
Journal of Materials Science, 2010, Vol 45, Issue 1, p130
- ISSN
0022-2461
- Publication type
Article
- DOI
10.1007/s10853-009-3902-0