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- Title
新型双压电制动高频压电点胶阀设计.
- Authors
吕思源; 赵润茂; 陈 刚; 王麒程; 吴 敏; 郑俊杰
- Abstract
In order to meet the increasingly precise dispenser needs of the semiconductor manufacturing and packaging industry, a new type of double piezoelectric driven jetting dispenser was designed. The piezoelectric of this structure formed a 90° transmission angle with the amplifier rod, which has high force transmission efficiency. The ceramic bearing bush was used at the pin shaft to play a self-lubricating role and reduce the friction between the amplification mechanism and the pin shaft. In addition, the injection capability of jetting dispenser was studied. The displacement, force and mode of the jetting dispenser amplification structure were analyzed by ANSYS. It was proved that the output displacement, force and resonance characteristics of the structure met the requirements of its basic injection capability. Furthermore, the hydrodynamic model of the jetting dispenser was established, and the injection stage was analyzed. The relationship between the dispensing speed and the structural parameters such as pressure and the diameter of the needle was discussed. Then, the two-phase flow simulation of the glue spraying process was carried out by using FLUENT, and the change process of the pressure and the glue spraying speed during the operation of the jetting dispenser was studied; The influence of different glue supply pressure and nozzle radius on the glue spray velocity was analyzed. The results show that the output displacement, stress, and resonance characteristics of the structure meet the conditions required for its basic injection capacity. The simulation study proves that the jetting dispenser structure has high frequency characteristics.The proposed new high-frequency piezoelectric jetting dispenser with double brakes and its analysis method for the dynamics of the dispenser process provide a new structure and research ideas.
- Subjects
FLOW simulations; GLUE; FRICTION; MANUFACTURING industries; PACKAGING industry; SPRAY nozzles; SEMICONDUCTOR manufacturing; TWO-phase flow
- Publication
Light Industry Machinery, 2023, Vol 41, Issue 3, p1
- ISSN
1005-2895
- Publication type
Article
- DOI
10.3969/j.issn.1005-2895.2023.03.001