We found a match
Your institution may have access to this item. Find your institution then sign in to continue.
- Title
Mikro ayna dizinli (DMD) 3 boyutlu yüzey ölçme siste-minin geliştirilmesi.
- Authors
Tıftıkcı, Karun Alper; DınıBütün, A. Talha
- Abstract
In this paper a new method for non-contact scanning of engineering surfaces will be presented. Similar to the classical confocal microscope principal but without using real physical pinholes a new method that uses Digital Micromirror Device (DMD™) as virtual illumination pinhole and selective CCD camera as virtual detection is developed. With this study, this new, flexible and highly accurate a micromirror- based system will be introduced. The concept concerning system layout and system performance together with the measurement results will be presented. Confocal microscopy was first described by M. Minsky in 1957 and in last couple decades it becomes one of the most powerful tool for 3D characterization of complex engineering surfaces. In reflection mode confocal microscopy applications a point illumination source is imaged onto object by using a microscope objective (first focus point). This focusing point on object results with maximum intensity on a detector by passing through the detector pinhole (second focus point) where the lights from defocused neighborhoods object regions are strongly suppressed by the pinhole. In other words, the detector signal that is determined by the pinhole size is reduced strongly by defocusing the specimen. This characteristic of confocal system gives us a chance to make optical sectioning with high vertical resolution discrimination by suppressing the scattered light from defocused object position. It is also well known that confocal microscopy gives some improvements in the sense of lateral resolution compared to the classical microscopy. (DMD™) technology was developed by Texas Instruments. The DMD that used in the setup consists of 600×800 programmable micromirrors. Each of these mirrors has 16μm × 16μm square size with a 1μm gap between them and each mirror tilt ±10° around the diagonal axis with help of underlying memory cel. DMD as a member of MEMS device can also be used as a light switch. …
- Subjects
OPTICAL measurements; ULTRAVIOLET photometry; CONFOCAL microscopy; PINHOLE photography; ENGINEERING design; DIGITAL cameras; DETECTORS; SCANNING systems; VIBRATION (Aeronautics)
- Publication
ITU Journal Series D: Engineering, 2010, Vol 9, Issue 2, p51
- ISSN
1303-703X
- Publication type
Article