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- Title
Features of surface structuring of silicon (100) crystals by microwave plasma treatment in different gas environments.
- Authors
Shanygin, V.; Yafarov, R.
- Abstract
The laws of the effect of microwave plasma treatment modes on the surface nanomorphology of silicon single crystals with crystallographic orientation (100) with a natural oxide coating are studied. Model mechanisms of surface nanostructuring during plasma treatment in gas environments with different selectivities for the heterostructure material of the substrate are discussed.
- Subjects
SURFACE structure; SILICON compounds; MICROWAVE plasmas; SINGLE crystals; CRYSTALLOGRAPHY; HETEROSTRUCTURES; SUBSTRATES (Materials science)
- Publication
Technical Physics Letters, 2013, Vol 39, Issue 5, p405
- ISSN
1063-7850
- Publication type
Article
- DOI
10.1134/S1063785013050106