We found a match
Your institution may have access to this item. Find your institution then sign in to continue.
- Title
A zinc oxide resonant nano-accelerometer with ultra-high sensitivity.
- Authors
Xu, Pengfei; Wang, Dazhi; He, Jianqiao; Cui, Yichang; Lu, Liangkun; Li, Yikang; Chen, Xiangji; Liu, Chang; Suo, Liujia; Ren, Tongqun; Wang, Tiesheng; Cui, Yan
- Abstract
Nanoelectromechanical system accelerometers have the potential to be utilized in next-generation consumer electronics, inertial navigation, and seismology due to their low cost, small size, and low power consumption. There is an urgent need to develop resonant accelerometer with high sensitivity, precision and robustness. Here, a zinc oxide resonant nano-accelerometer with high sensitivity has been designed and prototyped using zinc oxide nanowires. Within a device two nanowires were symmetrically placed close to a notched flexure to evaluate acceleration based on differential resonant frequencies. Additionally, microleverages were integrated in the accelerometer to enhance its sensitivity by amplifying the inertial force. High performance of the accelerometer has been demonstrated by the measured absolute sensitivity (16.818 kHz/g), bias instability (13.13 μg at 1.2 s integration time) and bandwidth (from 4.78 to 29.64 kHz), respectively. These results suggest that zinc oxide nanowires could be a candidate to develop future nanoelectromechanical resonant accelerometer potentially used for inertial navigation, tilt measurement, and geophysical measurements. The authors report a zinc oxide resonant nano-accelerometer with sensitivity up to 16.818 kHz/g, which is attributed to the nano-resonators using zinc oxide nanowires and the optimized microleverages and push-pull structures.
- Subjects
NANOELECTROMECHANICAL systems; NANOWIRES; HOUSEHOLD electronics; FLEXURE; ACCELEROMETERS; ZINC oxide
- Publication
Nature Communications, 2024, Vol 15, Issue 1, p1
- ISSN
2041-1723
- Publication type
Article
- DOI
10.1038/s41467-024-49145-9