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- Title
Distribution and Burgers vectors of dislocations in semiconductor wafers investigated by rocking- curve imaging.
- Authors
Lübbert, Daniel; Ferrari, Claudio; Mikulík, Petr; Pernot, Petra; Helfen, Lukas; Verdi, Nicola; Korytár, Dušan; Baumbach, Tilo
- Abstract
The method called ‘rocking-curve imaging’ (RCI) has recently been developed to visualize lattice imperfections in large crystals such as semiconductor wafers with high spatial resolution. The method is based on a combination of X-ray rocking-curve analysis and digital X-ray diffraction topography. In this article, an extension of the method is proposed by which dislocation densities in large-scale samples (semiconductor wafer crystals) can be quantified and their variation across the sample surface determined in an instrumentally simple way. Results from a nearly dislocation-free S-doped InP crystal and a semi-insulating GaAs are presented; both display a clearly non-random distribution of dislocations.
- Subjects
BURGERS' equation; CRYSTALS; SEMICONDUCTOR wafers; X-ray diffraction; DISLOCATIONS in crystals; CRYSTALLOGRAPHY
- Publication
Journal of Applied Crystallography, 2005, Vol 38, Issue 1, p91
- ISSN
0021-8898
- Publication type
Article
- DOI
10.1107/S0021889804028195