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- Title
Effect of the Electrical Conductivity of a Film on the Characteristics of an Radial Electric Field Excited Acoustic Resonator.
- Authors
Teplykh, A. A.; Zaitsev, B. D.; Semyonov, A. P.; Borodina, I. A.
- Abstract
The results of a study of the influence of the electrical conductivity of a thin film deposited on the free end of a radial electric field excited acoustic resonator field or located in its immediate vicinity on the resonator characteristics are presented. Three situations were considered: there is no conductive film, the film is deposited directly on the resonator free end, and the film is located at a short distance from the resonator free end. In all three cases, the electrical impedance of the resonator was calculated and measured in a wide frequency range of 1–1500 kHz. For the first time, the material constants of piezoceramics were refined for a free and short-circuited resonator and it was shown that these constants coincide with each other with good accuracy. It is shown that a decrease in the resonator thickness and an increase in the gap between the electrodes increase its sensitivity to the presence of a conductive film at a short distance from the resonator end.
- Subjects
ACOUSTIC resonators; ELECTRIC fields; ACOUSTIC field; ELECTRIC impedance; THIN films
- Publication
Acoustical Physics, 2022, Vol 68, Issue 6, p564
- ISSN
1063-7710
- Publication type
Article
- DOI
10.1134/S1063771022060136