Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleLow cross talk design and simple fabrication process of electrostatic vertical comb-drive actuators for positioning application.AuthorsZickar, Michael; Mita, Makoto; Ataka, Manabu; Fujita, HiroyukiPublicationIEEJ Transactions on Electrical & Electronic Engineering, 2007, Vol 2, Issue 3, p289ISSN1931-4973Publication typeArticleDOI10.1002/tee.20144