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- Title
CASTOR, a new instrument for combined XRR-GIXRF analysis at SOLEIL.
- Authors
Ménesguen, Y.; Boyer, B.; Rotella, H.; Lubeck, J.; Weser, J.; Beckhoff, B.; Grötzsch, D.; Kanngießer, B.; Novikova, A.; Nolot, E.; Lépy, M. ‐ C.
- Abstract
A new instrument called CASTOR is operated at the SOLEIL synchrotron facility and is dedicated to the characterization of thin films with thicknesses in the nanometer range. The instrument can combine X-ray reflectivity measurements with fluorescence (XRF) acquisitions and especially total reflection X-ray fluorescence-related techniques such as grazing incidence XRF. The instrument was successfully installed and operated on the two branches of the metrology beamline making possible experiments over a wide range of photon energies (45 eV to 40 keV). A heating sample holder was developed to allow the sample temperature to be controlled up to 300° C. Some examples of the first studies are given to illustrate the capabilities of the setup. Copyright © 2017 John Wiley & Sons, Ltd.
- Subjects
X-ray fluorescence; THICKNESS measurement; TEMPERATURE effect; PHYSICS experiments; MATHEMATICAL combinations
- Publication
XRS: X-ray Spectrometry, 2017, Vol 46, Issue 5, p303
- ISSN
0049-8246
- Publication type
Article
- DOI
10.1002/xrs.2742