Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleThe Effect of Sputter Cathode Design on Deposition Parameters: Design enhancements expand capabilities for the magnetron sputtering of thin films.AuthorsGaines, J.R.PublicationVakuum in Forschung und Praxis, 2019, Vol 31, Issue 5, p14ISSN0947-076XPublication typeArticleDOI10.1002/vipr.201900718