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- Title
Vibration Measurement and Suppression for Laser Galvanometers Using a Micro-electromechanical System-based Accelerometer.
- Authors
Po-Huan Chou; Yu-Liang Hsu; Shih-Chin Yang; Hsing-Cheng Chang; Yu-Chen Kuo; Li-Feng Chiu; Yu-Tai Chen
- Abstract
In this study, we develop a vibration measurement, analysis, and suppression system for laser galvanometers. A galvanometer control system integrates a notebook computer, an intelligent motion control platform (IMP-2), a servo driver circuit, and a galvanometer driver module for driving laser galvanometers. The proposed vibration measurement, analysis, and suppression system composed of a micro-electromechanical system (MEMS) piezoelectric accelerometer, the fast Fourier transformation (FFT) algorithm operated on a notebook computer, and an analog comb filter circuit is utilized to measure, analyze, and suppress vibrations generated from the mirror-installed galvanometer motors during rotation motions, respectively. First, we use the MEMS-based accelerometer to measure and record the vibration signals from the mirror-installed galvanometer motors during rotation motions. Second, we carry out the frequency spectrum analysis of vibration acceleration signals using the FFT algorithm. Subsequently, we design an efficient analog comb filter on the basis of the observed harmonic or resonance frequencies for suppressing the galvanometer vibrations. Finally, on the basis of the experimental results, we successfully validate that the proposed inertial-sensing-based vibration measurement, analysis, and suppression system can measure and analyze the galvanometer vibrations, and suppress them effectively to improve the accuracy and stability of the laser galvanometer scanning systems.
- Subjects
VIBRATION measurements; MOTION control devices; GALVANOMETER; MICROELECTROMECHANICAL systems; FOURIER transforms
- Publication
Sensors & Materials, 2018, Vol 30, Issue 11, Part 2, p2401
- ISSN
0914-4935
- Publication type
Article
- DOI
10.18494/SAM.2018.1976