Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleBeschichtung von metallischen Membranen mittels Pulsed Laser Deposition.AuthorsLackner, J.M.; Mukherji, D.; Waldhauser, W.; Wanderka, N.; Kardjilov, N.; Näth, O.; Jäger, S.; Schmitz, F.; Rösler, J.PublicationVakuum in Forschung und Praxis, 2008, Vol 20, Issue 4, p14ISSN0947-076XPublication typeArticleDOI10.1002/vipr.200800359