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- Title
Femto-Second Laser Direct Writing Vertical Microholes in FOTURAN Glass.
- Authors
Wu, Y.; Qingyue Wang
- Abstract
Vertical micro-holes were produced in a photosensitive glass (FOTURAN) using a focused femto-second laser irradiation at 775 nm, followed by a heat treatment and wet chemical etching in 8% hydrofluoric acid solution for 50 minutes. The micro-holes were analysed by optical and scanning electron microscopy. it is observed that the micro-holes have a circular cross-section and clear edge. Currently, micro-holes with an aspect ratio of about 7:1 can be achieved. By varying the incident laser fluence over a range of 2.3-36.2 J/cm² and a laser writing speed of 100-1000 μm/s. it is possible to produce and characterize micro-holes. It is found that writing speeds hardly affect the micro-hole diameter whereas relatively lower laser fluences result in smaller diameters and the cross-section is more circular.
- Subjects
MICROSCOPY; SCANNING electron microscopy; HEAT treatment of metals; HYDROFLUORIC acid; PHOTOSENSITIVE glass
- Publication
Lasers in Engineering (Old City Publishing), 2009, Vol 19, Issue 1/2, p39
- ISSN
0898-1507
- Publication type
Article