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- Title
Ultralow‐Power Piezo‐Optomechanically Tuning on CMOS‐Compatible Integrated Silicon‐Hafnium‐Oxide Platform (Laser Photonics Rev. 17(2)/2023).
- Authors
Shen, Jian; Fan, Yuyan; Xu, Zihan; Wu, Liying; Wang, Ying; Li, Xiuyan; Gan, Xuetao; Zhang, Yong; Su, Yikai
- Abstract
By introducing Zr-doped HfO2 thin film as an active optical and piezoelectric layer, the tunable silicon-hafnium-oxide hybrid microring is capable of linear bidirectional tuning with ultra-low power consumption. B Photonic Integrated Circuits b In article number 2200248, Yong Zhang, Xiuyan Li, Yikai Su, and colleagues experimentally demonstrate ultra-low-power piezo-optomechanical tuning on a complementary metal-oxide-semiconductor (CMOS)-compatible integrated silicon-hafnium-oxide platform. The hybrid silicon-hafnium-oxide technology with CMOS compatibility advances the field of ultra-low-power integrated photonic devices and can find applications in optical communications, computing, and spaces under cryogenic temperatures.
- Subjects
LASERS; OPTICAL films
- Publication
Laser & Photonics Reviews, 2023, Vol 17, Issue 2, p1
- ISSN
1863-8880
- Publication type
Article
- DOI
10.1002/lpor.202370006