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- Title
Piezoelectric Actuated Phase Shifter Based on External Laser Interferometer: Design, Control and Experimental Validation.
- Authors
Peng-Zhi Li; Xiao-Dong Wang; Yong-Xin Sui; De-Fu Zhang; Dong-Fang Wang; Li-Jian Dong; Ming-Yang Ni
- Abstract
To improve the phase-shifting accuracy, this paper presents a novel integrated framework for design, control and experimental validation of the piezoelectric actuated phase shifter with a trade-off between accuracy and cost. The piezoelectric actuators with built-in sensors are adopted to drive the double parallel four-bar linkage flexure hinge-based mechanisms. Three mechanisms form the tripod structure of the assembled phase shifter. Then, a semi-closed loop controller with inner feedback and outer feedforward loops via the external laser interferometer is developed for accurate positioning of the phase shifter. Finally, experiments related with travel range, step response, linearity and repeatability are carried out. The linearity error is 0.21% and the repeatability error of 10 µm displacement is 3 nm. The results clearly demonstrate the good performance of the developed phase shifter and the feasibility of the proposed integrated framework.
- Subjects
PIEZOELECTRIC actuators; COST; CONJOINT analysis; PHASE shifters; DETECTORS
- Publication
Sensors (14248220), 2017, Vol 17, Issue 4, p838
- ISSN
1424-8220
- Publication type
Article
- DOI
10.3390/s17040838