Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleComputational thermodynamic study of SiC chemical vapor deposition from MTS‐H<sub>2</sub>*.AuthorsPeng, Jian; Jolly, Brian; Mitchell, David J.; Haynes, J. Allen; Shin, DongwonPublicationJournal of the American Ceramic Society, 2021, Vol 104, Issue 7, p3726ISSN0002-7820Publication typeArticleDOI10.1111/jace.17742