We found a match
Your institution may have access to this item. Find your institution then sign in to continue.
- Title
Study of structural and transport properties of nanostructured CeO<sub>2</sub>, Ce<sub>1− x</sub>Ru<sub> x</sub>O<sub>2</sub> and Ce<sub>1− x</sub>In<sub> x</sub>O<sub>2</sub> thin films.
- Authors
Rangel, R.; Chávez-Chávez, L.; Martínez, E.; Bartolo-Pérez, P.
- Abstract
The present work reports for the first time thin films prepared from Ce1− xM xO2− δ (M = Ru, In) solid solutions for application as gas sensors. The CeO2, Ce0.95Ru0.05O2 and Ce0.95In0.05O2 thin films were prepared by means of the RF sputtering process onto Si (111) substrates. The deposition conditions were carried out at 500 °C varying the deposition time. Targets were prepared via sol-gel process starting from C6H9O6In, Ru3(CO)12 and Ce(C2H3O2)3 · 1.5H2O compounds and using a ceramic method to consolidate them. The samples were characterized by means of XRD, SEM, and AFM. Their thickness was measured using a profilometer. The results herein obtained regarding the microstructure and transport properties indicate that these materials can be used as gas sensors.
- Publication
Physica Status Solidi (B), 2012, Vol 249, Issue 6, p1199
- ISSN
0370-1972
- Publication type
Article
- DOI
10.1002/pssb.201100561