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- Title
Nanoimprint Replication of Biomimetic, Multilevel Undercut Nanostructures.
- Authors
Muehlberger, Michael; Ruttloff, Stephan; Nees, Dieter; Moharana, Amiya; Belegratis, Maria R.; Taus, Philipp; Kopp, Sonja; Wanzenboeck, Heinz D.; Prinz, Adrian; Fechtig, Daniel; Jefimovs, Konstantins
- Abstract
The nanoimprint replication of biomimetic nanostructures can be interesting for a wide range of applications. We demonstrate the process chain for Morpho-blue-inspired nanostructures, which are especially challenging for the nanoimprint process, since they consist of multilayer undercut structures, which typically cannot be replicated using nanoimprint lithography. To achieve this, we used a specially made, proprietary imprint material to firstly allow successful stamp fabrication from an undercut master structure, and secondly to enable UV-based nanoimprinting using the same material. Nanoimprinting was performed on polymer substrates with stamps on polymer backplanes to be compatible with roller-based imprinting processes. We started with single layer undercut structures to finally show that it is possible to successfully replicate a multilayer undercut stamp from a multilayer undercut master and use this stamp to obtain multilayer undercut nanoimprinted samples.
- Subjects
NANOIMPRINT lithography; NANOSTRUCTURES; BIOMIMETIC materials; BIOMIMETIC chemicals
- Publication
Nanomaterials (2079-4991), 2021, Vol 11, Issue 4, p1051
- ISSN
2079-4991
- Publication type
Article
- DOI
10.3390/nano11041051