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- Title
Deposition of Nanocrystalline BiTe Films Using a Modified MOCVD System.
- Authors
You, HyunWoo; Bae, Sung-Hwan; Kim, Jongman; Kim, Jin-Sang; Park, Chan
- Abstract
Nanocrystalline BiTe films were deposited on (100) GaAs substrates using a modified metalorganic chemical vapor deposition (MOCVD) system, and the effect of growth parameters on the structural properties were investigated. The modified MOCVD system employed a mixing room for the formation of nanoparticles of BiTe by gas-phase reaction and a graphite susceptor for growth of nanoparticles on the substrate. The grown films contained many crystallites of nanosize, and large crystallites consisted of small particles a few tens of nanometer in size. This nanostructured film approach can be an economical way of producing high-performance thermoelectric films with nanostructure compared with other top-down methods.
- Subjects
METAL organic chemical vapor deposition; BISMUTH compounds; ORGANOMETALLIC compounds; NANOCRYSTALS; THIN films; GRAPHITE; THERMOELECTRICITY; SUBSTRATES (Materials science)
- Publication
Journal of Electronic Materials, 2011, Vol 40, Issue 5, p635
- ISSN
0361-5235
- Publication type
Article
- DOI
10.1007/s11664-010-1490-z