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- Title
Features of Defect Formation on a Deformed Si(111) Surface.
- Authors
Betekhtin, V. I.; Gorobeı, N. N.; Korsukov, V. E.; Luk’yanenko, A. S.; Obidov, B. A.; Tomilin, A. N.
- Abstract
Dynamics of the surface relief on a Si(111) single crystal face of a sample subjected to biaxial lateral extension after mechanical or chemical polishing was studied using scanning tunneling microscopy. In both cases, despite certain differences, the sample surface shows evidence of relief dynamics on a nanometer scale and exhibits a fractal character of the spatial structure formed in late stages of the process.
- Subjects
CRYSTAL defects; SILICON crystals
- Publication
Technical Physics Letters, 2002, Vol 28, Issue 11, p893
- ISSN
1063-7850
- Publication type
Article
- DOI
10.1134/1.1526874