We found a match
Your institution may have access to this item. Find your institution then sign in to continue.
- Title
Online Monitoring of Nanoparticle Contamination in Reactive Gases.
- Authors
Schmid, Otmar; Trueblood, Max B.; Hagen, Donald E.; Whitefield, Philip D.
- Abstract
Focuses on the research regarding online monitoring of nanoparticle contamination in reactive gases. Requirements of numerous manufacturing processes to ensure product quality; Necessity of online monitoring of the cleanliness of possibly reactive process gases for quality control purposes; Design for an online nanoparticle monitoring system for reactive process gases from commercially available components.
- Subjects
NANOPARTICLES; INDUSTRIAL contamination; QUALITY control; QUALITY assurance; SOLID rare gases; NOBLE gases; COMPUTER systems
- Publication
Journal of the IEST, 2004, Vol 47, p111
- ISSN
1098-4321
- Publication type
Article
- DOI
10.17764/jiet.47.1.yt2052u20293773w