Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.Title3D Composition Imaging Using a Dedicated FIB/STEM System.AuthorsYaguchi, T.; Konno, M.; Kamino, T.; Kaji, K.; Ohnishi, T.; Watanabe, M.PublicationMicroscopy & Microanalysis, 2005, Vol 11, p630ISSN1431-9276Publication typeArticleDOI10.1017/S1431927605503143