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- Title
Investigation of the Plasma of a 308-nm XeCl Excimer Light Emitter Based on an Inert-Gas–CCl[sub 4] Mixture.
- Authors
Shuaibov, A. K.
- Abstract
Results are presented from optical measurements of the plasma of a transverse volume discharge in He(Ar)/Xe/CC1[sub 4](HC1) mixtures (at pressures of P = 10-100 kPa) that are used in excimer lamps emitting the XeC1308-nm band. Emission spectra in different stages of the formation and degradation of the active medium, as well as temporal and resource characteristics of the emitter, are studied. The main products of decomposition of CC1[sub 4] molecules that are detected by the plasma emission are C[sup *] atoms and C[sup *, sub 2] and CN[sup *] radicals. The operating resource of the XeC1 emitter is found to be (3-5) × 10[sup 4] pulses and depends strongly on the pressure and composition of the active medium. The duration of the emission pulse at a wavelength of λ = 308 nm is 200-.
- Subjects
PLASMA gases; EXCIMER lasers; LIGHT emitting diodes
- Publication
Technical Physics, 2000, Vol 45, Issue 6, p797
- ISSN
1063-7842
- Publication type
Article
- DOI
10.1134/1.1259725