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- Title
Growth‐Parameter Dependence of Polarity and Electronic Transports in ZnO Thin Films Deposited by Magnetron Sputtering.
- Authors
Ohsawa, Takeo; Tsunoda, Kei; Dierre, Benjamin; Grachev, Sergey; Montigaud, Hervé; Ishigaki, Takamasa; Ohashi, Naoki
- Abstract
Growth‐parameter dependence of crystalline polarity and associated electronic transport properties of zinc oxide (ZnO) thin films deposited by radio‐frequency magnetron sputtering are investigated. The magnitudes of sputtering input power and distance between the substrate and ZnO target play crucial roles in controlling the polarity either the (0001) or ( 000 1 ¯ ) planes. In addition, the crystallinities and surface morphologies of the films are largely different between the two types of planes. Remarkably, electrical conductivities of the (0001) films are a few orders of magnitude higher than those of the ( 000 1 ¯ )planes, which could be attributed to differences in the carrier concentration and Hall mobility. Insights gained in this study regarding controllable polarity is significant for understanding complicated optoelectronic properties even in nominally undoped ZnO films.
- Subjects
POLARITY (Physics); ZINC oxide; MAGNETRON sputtering; CRYSTALLINITY; HALL mobility
- Publication
Physica Status Solidi. A: Applications & Materials Science, 2018, Vol 215, Issue 16, p1
- ISSN
1862-6300
- Publication type
Article
- DOI
10.1002/pssa.201700838