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- Title
Vacuum coating thin films offers increased productivity.
- Abstract
This article reports that a vacuum coating system for thin film deposition processes has been added to its range of equipment by Wilmington, Massachusetts-based BOC Edwards. The TF600 system combines a 600 mm wide coating chamber with a high throughput vacuum pumping system. The system is designed to deliver increased productivity and flexibility for production of substrates in the semiconductor, laser, and scientific industries. Pumping system options include diffusion, turbomolecular, and cryogenic high vacuum pumps.
- Subjects
WILMINGTON (Mass. : Town); MASSACHUSETTS; PUMPING machinery; COATING processes; BOC Edwards Inc.; HYDRAULIC machinery; SURFACES (Technology)
- Publication
Advanced Materials & Processes, 2004, Vol 162, Issue 12, p17
- ISSN
0882-7958
- Publication type
Article