Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleCapacitors with an Equivalent Oxide Thickness of <0.5 nm for Nanoscale Electronic Semiconductor Memory.AuthorsKim, Seong Keun; Lee, Sang Woon; Han, Jeong Hwan; Lee, Bora; Han, Seungwu; Hwang, Cheol SeongPublicationAdvanced Functional Materials, 2010, Vol 20, Issue 18, p2989ISSN1616-301XPublication typeArticleDOI10.1002/adfm.201000599