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- Title
Modulation interference microscope as a tool for measuring the linear dimensions of nanostructures.
- Authors
Andreev, A.; Grigoriev, S.; Romash, E.; Bushuev, S.; Ignatiev, P.; Loparev, A.; Indukaev, K.; Osipov, P.
- Abstract
A new version of a modulation interference microscope with long-path coordinate table resting on aeromagnetic guides that enables travel of the microscope with deviation from linearity of at most 0.1 μm on path lengths up to 300 mm has been developed. The metrological aspects of the use of the microscope for measurement of the linear dimensions of nanostructures are considered. Results of measurements of the basic parameters of the topology of integrated circuits are presented.
- Subjects
MICROSCOPES; NANOMETROLOGY; INTEGRATED circuits; METROLOGY; NANOSTRUCTURES
- Publication
Measurement Techniques, 2012, Vol 55, Issue 5, p542
- ISSN
0543-1972
- Publication type
Article
- DOI
10.1007/s11018-012-9996-9