Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleP‐10.2: The Influences of PECVD Deposition SiNx on the Thin Film Encapsulation Performance.AuthorsLiu, Shengfang; Li, Xueyuan; Zhu, Ping; Huang, Ying; Gao, Xiaoyu; Huang, XiuqiPublicationSID Symposium Digest of Technical Papers, 2018, Vol 49, p706ISSN0097-966XPublication typeArticleDOI10.1002/sdtp.12821