Back to matchesWe found a matchYour institution may have access to this item. Find your institution then sign in to continue.TitleCorrelative characterization of plasma etching resistance of various aluminum garnets.AuthorsStern, Christian; Schwab, Christian; Kindelmann, Moritz; Stamminger, Mark; Weirich, Thomas E.; Park, Inhee; Hausen, Florian; Finsterbusch, Martin; Bram, Martin; Guillon, OlivierPublicationJournal of the American Ceramic Society, 2024, Vol 107, Issue 11, p7105ISSN0002-7820Publication typeArticleDOI10.1111/jace.19951