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- Title
A Method of Precise Auto-Calibration in a Micro-Electro-Mechanical System Accelerometer.
- Authors
Łuczak, Sergiusz; Ekwińska, Magdalena; Tomaszewski, Daniel
- Abstract
A novel design of a MEMS (Micro-Electromechanical System) capacitive accelerometer fabricated by surface micromachining, with a structure enabling precise auto-calibration during operation, is presented. Precise auto-calibration was introduced to ensure more accurate acceleration measurements compared to standard designs. The standard mechanical structure of the accelerometer (seismic mass integrated with elastic suspension and movable plates coupled with fixed plates forming a system of differential sensing capacitors) was equipped with three movable detection electrodes coupled with three fixed electrodes, thus creating three atypical tunneling displacement transducers detecting three specific positions of seismic mass with high precision, enabling the auto-calibration of the accelerometer while it was being operated. Auto-calibration is carried out by recording the accelerometer indication while the seismic mass occupies a specific position, which corresponds to a known value of acting acceleration determined in a pre-calibration process. The diagram and the design of the mechanical structure of the accelerometer, the block diagram of the electronic circuits, and the mathematical relationships used for auto-calibration are presented. The results of the simulation studies related to mechanical and electric phenomena are discussed.
- Subjects
MICROELECTROMECHANICAL systems; ACCELEROMETERS; BLOCK diagrams; ELECTRONIC circuits; DIFFERENTIAL forms; CAPACITIVE sensors; SEISMOGRAMS; CALIBRATION
- Publication
Sensors (14248220), 2024, Vol 24, Issue 12, p4018
- ISSN
1424-8220
- Publication type
Article
- DOI
10.3390/s24124018