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- Title
Fabrication and characterization of iron and fluorine co-doped BST thin films for microwave applications.
- Authors
Stemme, F.; Bruns, M.; Geßwein, H.; Schroeder, M.; Sazegar, M.; Drahus, M.; Eichel, R.-A.; Paul, F.; Azucena, C.; Binder, J.
- Abstract
The effects of fluorine co-doping by means of a post-thermal annealing process of iron-doped BST thin films in a fluorine-containing atmosphere have been investigated. XPS and ToF-SIMS sputter depth profiling verified a homogeneous fluorine distribution in the thin films. By employing EPR, it was shown that singly charged (Fe'Ti—VO¨) defect complexes, as well as 'isolated' Fe'Ti centres with a distribution of FO sites in remote coordination spheres exist in the fluorinated films. Tunability enhancement due to fluorine co-doping as well as a Q-factor enhancement due to iron doping is demonstrated.
- Subjects
ELECTRIC properties of barium strontium titanate; BARIUM strontium titanate synthesis; DOPING agents (Chemistry); FLUORINE; IRON; QUALITY factor meters
- Publication
Journal of Materials Science, 2013, Vol 48, Issue 9, p3586
- ISSN
0022-2461
- Publication type
Article
- DOI
10.1007/s10853-013-7156-5