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- Title
Effect of the substrate temperature on the properties of spray-deposited SnO:F thin films.
- Authors
Tang, Ping; Qiu, Chuankai; He, Jingjing; Zhang, Tiejun; Feng, Xiao; Luo, Xiangang
- Abstract
The effect of the substrate temperature on the properties of spray-deposited SnO:F thin films is investigated. X-ray diffraction patterns show that the crystallinity of the films is enhanced with the increasing of substrate temperature. Comparing the SEM images, both the particle size and density are increased at a higher deposition temperature. The lowest sheet resistance of 8.43 Ω/□ is obtained at the substrate temperature of 350 °C. In addition, the average optical transmittance of the three films reaches up to 85 % in the visible range. The absorption coefficient is the lowest at 350 °C. The band gap increases from 3.36 to 3.61 eV while the electrical resistivity of SnO:F thin films decreases from 8.51 × 10 to 9.86 × 10 Ω cm as elevating the substrate temperature from 250 to 350 °C.
- Subjects
TIN oxides; FLUORINE; EFFECT of temperature on thin films; THIN film research; X-ray diffraction
- Publication
Journal of Materials Science: Materials in Electronics, 2014, Vol 25, Issue 10, p4369
- ISSN
0957-4522
- Publication type
Article
- DOI
10.1007/s10854-014-2175-9